Features of the selective manganese doping of GaAs structures
Features of the selective manganese doping of GaAs structures
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Publisher
Moscow: Pleiades Publishing
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Language
English
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Publisher
Moscow: Pleiades Publishing
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Contents
The effect of technological parameters on the selective manganese doping of arsenide–gallium heterostructures fabricated by a combination of methods of MOS-hydride epitaxy and pulsed-laser deposition is investigated. As these parameters, the impurity content in the manganese δ layer and the structureformation temperature are used. It is established...
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Full title
Features of the selective manganese doping of GaAs structures
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Record Identifier
TN_cdi_osti_scitechconnect_22756262
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_osti_scitechconnect_22756262
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ISSN
1063-7826
E-ISSN
1090-6479
DOI
10.1134/S1063782617110148