Novel materials by atomic layer deposition and molecular layer deposition : PROGRESS AND FUTURE DIRE...

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_pascalfrancis_primary_25230563

Novel materials by atomic layer deposition and molecular layer deposition : PROGRESS AND FUTURE DIRECTIONS FOR ATOMIC LAYER DEPOSITION AND ALD-BASED CHEMISTRY

About this item

Full title

Novel materials by atomic layer deposition and molecular layer deposition : PROGRESS AND FUTURE DIRECTIONS FOR ATOMIC LAYER DEPOSITION AND ALD-BASED CHEMISTRY

Author / Creator

LESKELÄ, Markku , RITALA, Mikko and NILSEN, Ola

Publisher

Warrendale, PA: Materials Research Society

Journal title

MRS bulletin, 2011, Vol.36 (11), p.877-884

Language

English

Formats

Articles

Publication information

Publisher

Warrendale, PA: Materials Research Society

Subjects

Subjects and topics

More information

Alternative Titles

Full title

Novel materials by atomic layer deposition and molecular layer deposition : PROGRESS AND FUTURE DIRECTIONS FOR ATOMIC LAYER DEPOSITION AND ALD-BASED CHEMISTRY

Authors, Artists and Contributors

Author / Creator

LESKELÄ, Markku
RITALA, Mikko
NILSEN, Ola

Identifiers

Primary Identifiers

Record Identifier

TN_cdi_pascalfrancis_primary_25230563

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_pascalfrancis_primary_25230563

Other Identifiers

ISSN

0883-7694

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