Possibilities of ion-beam diagnostics of thin-film epitaxial and nonoriented structures
Possibilities of ion-beam diagnostics of thin-film epitaxial and nonoriented structures
About this item
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Publisher
Heidelberg: Allerton Press
Journal title
Language
English
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Publication information
Publisher
Heidelberg: Allerton Press
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Scope and Contents
Contents
Certain possibilities and features of ion-beam diagnostics of thin-film epitaxial and nonoriented structures are discussed. The main advantage of this technique (its ability to determine the element concentration profile across the target depth of several micrometers without destroying the target and the need to use standards) is illustrated by rea...
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Full title
Possibilities of ion-beam diagnostics of thin-film epitaxial and nonoriented structures
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Author / Creator
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Record Identifier
TN_cdi_proquest_journals_1931049297
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_1931049297
Other Identifiers
ISSN
1062-8738
E-ISSN
1934-9432
DOI
10.3103/S1062873814060100
