Clamp-tapering increases the quality factor of stressed nanobeams
Clamp-tapering increases the quality factor of stressed nanobeams
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Ithaca: Cornell University Library, arXiv.org
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English
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Ithaca: Cornell University Library, arXiv.org
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Stressed nanomechanical resonators are known to have exceptionally high quality factors (\(Q\)) due to the dilution of intrinsic dissipation by stress. Typically, the amount of dissipation dilution and thus the resonator \(Q\) is limited by the high mode curvature region near the clamps. Here we study the effect of clamp geometry on the \(Q\) of na...
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Clamp-tapering increases the quality factor of stressed nanobeams
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TN_cdi_proquest_journals_2115561499
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2115561499
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E-ISSN
2331-8422
DOI
10.48550/arxiv.1810.00414