Fabrication and Annealing Temperature Optimization for a Piezoelectric ZnO Based MEMS Acoustic Senso...
Fabrication and Annealing Temperature Optimization for a Piezoelectric ZnO Based MEMS Acoustic Sensor
About this item
Full title
Author / Creator
Publisher
New York: Springer US
Journal title
Language
English
Formats
Publication information
Publisher
New York: Springer US
Subjects
More information
Scope and Contents
Contents
This paper reports the development of an acoustic sensor structure with a square-shaped diaphragm with side length 1750 μm. The fabricated structure has been annealed at different temperatures and is characterized using a laser Doppler vibrometer (LDV). The piezoelectric zinc oxide (ZnO) layer is deposited using radio frequency sputtering technique...
Alternative Titles
Full title
Fabrication and Annealing Temperature Optimization for a Piezoelectric ZnO Based MEMS Acoustic Sensor
Authors, Artists and Contributors
Author / Creator
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_journals_2247259529
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2247259529
Other Identifiers
ISSN
0361-5235
E-ISSN
1543-186X
DOI
10.1007/s11664-019-07383-4
