Surface finish prediction models for precision grinding of silicon
Surface finish prediction models for precision grinding of silicon
About this item
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Publisher
London: Springer-Verlag
Journal title
Language
English
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Publication information
Publisher
London: Springer-Verlag
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Scope and Contents
Contents
Conventional grinding of silicon substrates results in poor surface quality unless they are machined in ductile mode on expensive ultra-precision machine tools. However, precision grinding can be used to generate massive ductile surfaces on silicon so that the polishing time can be reduced immensely and surface quality improved. However, precision...
Alternative Titles
Full title
Surface finish prediction models for precision grinding of silicon
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Author / Creator
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Record Identifier
TN_cdi_proquest_journals_2262400984
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2262400984
Other Identifiers
ISSN
0268-3768
E-ISSN
1433-3015
DOI
10.1007/s00170-011-3438-8
