Formation of Low-Resistivity Au/Mo/Ti Ohmic Contacts to p-Diamond Epitaxial Layers
Formation of Low-Resistivity Au/Mo/Ti Ohmic Contacts to p-Diamond Epitaxial Layers
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Full title
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Publisher
Moscow: Pleiades Publishing
Journal title
Language
English
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Publisher
Moscow: Pleiades Publishing
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Scope and Contents
Contents
The formation of Au/Mo/Ti ohmic contacts to
p
-diamond epitaxial films has been studied. Specifically, the influence of annealing on the electrical properties and structure of contacts has been investigated. It has been shown that the upper gold layer protects the contact system against oxidation up to 850°C during RTA unlike the case of a “s...
Alternative Titles
Full title
Formation of Low-Resistivity Au/Mo/Ti Ohmic Contacts to p-Diamond Epitaxial Layers
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Record Identifier
TN_cdi_proquest_journals_2343273088
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2343273088
Other Identifiers
ISSN
1063-7842
E-ISSN
1090-6525
DOI
10.1134/S1063784219120041
