A resonant pressure MEMS sensor based on levitation force excitation detection
A resonant pressure MEMS sensor based on levitation force excitation detection
About this item
Full title
Author / Creator
Publisher
Dordrecht: Springer Netherlands
Journal title
Language
English
Formats
Publication information
Publisher
Dordrecht: Springer Netherlands
Subjects
More information
Scope and Contents
Contents
This paper proposes a MEMS resonant pressure sensor through implementing an out-of-plane repulsive (levitation) force to enhance the sensor detection threshold and consequently widen its sensing range. 2D and 3D finite-element simulations are conducted and compared to some available experimental data. The simulated results show an increase in the g...
Alternative Titles
Full title
A resonant pressure MEMS sensor based on levitation force excitation detection
Authors, Artists and Contributors
Author / Creator
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_journals_2396102847
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2396102847
Other Identifiers
ISSN
0924-090X
E-ISSN
1573-269X
DOI
10.1007/s11071-020-05579-6
