Potassium persulfate as an oxidizer in chemical mechanical polishing slurries relevant for copper in...
Potassium persulfate as an oxidizer in chemical mechanical polishing slurries relevant for copper interconnects with cobalt barrier layers
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Publisher
New York: Springer US
Journal title
Language
English
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Publisher
New York: Springer US
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Scope and Contents
Contents
Cobalt (Co) has been applied as one of the most promising candidates of barrier metals for copper (Cu) interconnects. The present work describes the static etching and chemical mechanical polishing process of Cu and Co, which were conducted by potassium persulfate (K
2
S
2
O
8
) as an oxidizer at various pH values. It was found th...
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Full title
Potassium persulfate as an oxidizer in chemical mechanical polishing slurries relevant for copper interconnects with cobalt barrier layers
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TN_cdi_proquest_journals_2397990422
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2397990422
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ISSN
0022-2461
E-ISSN
1573-4803
DOI
10.1007/s10853-020-04579-6
