High-yield wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic...
High-yield wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
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Ithaca: Cornell University Library, arXiv.org
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English
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Publisher
Ithaca: Cornell University Library, arXiv.org
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Contents
Low-loss photonic integrated circuits (PIC) and microresonators have enabled novel applications ranging from narrow-linewidth lasers, microwave photonics, to chip-scale optical frequency combs and quantum frequency conversion. To translate these results into a widespread technology, attaining ultralow optical losses with established foundry manufac...
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Full title
High-yield wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
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Record Identifier
TN_cdi_proquest_journals_2407685036
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2407685036
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E-ISSN
2331-8422
DOI
10.48550/arxiv.2005.13949
