Optically Detected Magnetic Resonance Study of 3D Arrayed Silicon Vacancies in SiC pn Diodes
Optically Detected Magnetic Resonance Study of 3D Arrayed Silicon Vacancies in SiC pn Diodes
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Pfaffikon: Trans Tech Publications Ltd
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English
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Pfaffikon: Trans Tech Publications Ltd
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We demonstrated optically detected magnetic resonance (ODMR) measurements using three-dimensional (3D) arrayed silicon vacancies (VSis) in in-plane SiC pn diodes. Proton beam writing successfully created 3D arrayed VSis using different ion (proton) energies. The results of PL mapping analysis indicate that the features of luminescent spot such as s...
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Optically Detected Magnetic Resonance Study of 3D Arrayed Silicon Vacancies in SiC pn Diodes
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TN_cdi_proquest_journals_2429132896
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2429132896
