High-Speed and Large-Amplitude Resonant Varifocal Mirror
High-Speed and Large-Amplitude Resonant Varifocal Mirror
About this item
Full title
Author / Creator
Publisher
Tokyo: Fuji Technology Press Co. Ltd
Journal title
Language
English
Formats
Publication information
Publisher
Tokyo: Fuji Technology Press Co. Ltd
Subjects
More information
Scope and Contents
Contents
We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type focus scanning optical element. A circumference supported type mirror and a node supported type mirror with a 1 mm diameter driven by an electrostatic actuator are investigated. In the node supported type, a larger amplitude compared to that of the circumf...
Alternative Titles
Full title
High-Speed and Large-Amplitude Resonant Varifocal Mirror
Authors, Artists and Contributors
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_journals_2460075092
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2460075092
Other Identifiers
ISSN
0915-3942
E-ISSN
1883-8049
DOI
10.20965/jrm.2020.p0344
