In situ investigation of nanometric cutting of 3C-SiC using scanning electron microscope
In situ investigation of nanometric cutting of 3C-SiC using scanning electron microscope
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Author / Creator
Tian, Dongyu , Xu, Zongwei , Liu, Lei , Zhou, Zhanqi , Zhang, Junjie , Zhao, Xuesen , Hartmaier, Alexander , Liu, Bing , Song, Le and Luo, Xichun
Publisher
London: Springer London
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Language
English
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Publisher
London: Springer London
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Contents
Experimentally revealing the nanometric deformation behavior of 3C-SiC is challenging due to its ultra-small feature size for brittle-to-ductile transition. In the present work, we elucidated the nanometric cutting mechanisms of 3C-SiC by performing in situ nanometric cutting experiments under scanning electron microscope (SEM), as well as post-cha...
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Full title
In situ investigation of nanometric cutting of 3C-SiC using scanning electron microscope
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Record Identifier
TN_cdi_proquest_journals_2550484233
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2550484233
Other Identifiers
ISSN
0268-3768
E-ISSN
1433-3015
DOI
10.1007/s00170-021-07278-x