Recycle of synthetic calcium fluoride and waste sulfuric acid to produce electronic grade hydrofluor...
Recycle of synthetic calcium fluoride and waste sulfuric acid to produce electronic grade hydrofluoric acid
About this item
Full title
Author / Creator
Publisher
Berlin/Heidelberg: Springer Berlin Heidelberg
Journal title
Language
English
Formats
Publication information
Publisher
Berlin/Heidelberg: Springer Berlin Heidelberg
Subjects
More information
Scope and Contents
Contents
An innovative method for utilizing synthetic calcium fluoride (CaF
2
), recovered from fluoride-containing semiconductor wastewater, and waste sulfuric acid (H
2
SO
4
) to produce hydrofluoric acid (HF) was investigated. The research was set to study the low-temperature production of HF via reaction of synthetic CaF
2
and wa...
Alternative Titles
Full title
Recycle of synthetic calcium fluoride and waste sulfuric acid to produce electronic grade hydrofluoric acid
Authors, Artists and Contributors
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_journals_2559543577
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2559543577
Other Identifiers
ISSN
0944-1344
E-ISSN
1614-7499
DOI
10.1007/s11356-020-09867-x
