Structural and electronic properties of anatase Ti1−xFexO2−δ thin film prepared by RF magnetron sput...
Structural and electronic properties of anatase Ti1−xFexO2−δ thin film prepared by RF magnetron sputtering
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Author / Creator
Usui, K , Okumura, T , Sakai, E , Kumigashira, H and Higuchi, T
Publisher
Bristol: IOP Publishing
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Language
English
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Publisher
Bristol: IOP Publishing
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Contents
Ti1-xFexO2-δ thin films have been deposited on Nb-doped SrTiO3 substrate by RF magnetron sputtering. The as-deposited thin films prepared at Tsub 300 ~ 500°C exhibit anatase structure. The lattice constant depends on the crystallization temperature. The substitution of Fe ions is confirmed by photoemission spectra. The Ti 2p X-ray absorption spectr...
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Full title
Structural and electronic properties of anatase Ti1−xFexO2−δ thin film prepared by RF magnetron sputtering
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Record Identifier
TN_cdi_proquest_journals_2576638034
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2576638034
Other Identifiers
ISSN
1742-6588
E-ISSN
1742-6596
DOI
10.1088/1742-6596/502/1/012001
