Analysis of response to thermal noise in electrostatic MEMS bifurcation sensors
Analysis of response to thermal noise in electrostatic MEMS bifurcation sensors
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Publisher
Dordrecht: Springer Netherlands
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Language
English
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Publisher
Dordrecht: Springer Netherlands
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This paper presents an alternative approach to stochastic analysis of nonlinear dynamic systems. It exploits this approach to analyze the response of electrostatic MEMS bifurcation sensors to a combination of deterministic excitation, mechanical-thermal noise, and electrical-thermal noise. The analytical approach combines the methods of multiple sc...
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Full title
Analysis of response to thermal noise in electrostatic MEMS bifurcation sensors
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TN_cdi_proquest_journals_2616480356
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2616480356
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ISSN
0924-090X
E-ISSN
1573-269X
DOI
10.1007/s11071-021-07002-0
