Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets
Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets
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Heidelberg: Springer Nature B.V
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Language
English
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Heidelberg: Springer Nature B.V
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This paper addresses the problem of real-time deadlock-free scheduling for a semiconductor track system. The system is required to process wafers continuously, cassette by cassette. The process is not necessarily a repeated one. In addition, the system is deadlock-prone and its modules are failure-prone. Thus, real-time scheduling approaches are re...
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Full title
Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets
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TN_cdi_proquest_journals_2665374515
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2665374515
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ISSN
0171-6468
E-ISSN
1436-6304
DOI
10.1007/s00291-006-0046-3
