Macroparticle Reduction and Its Transport Mechanism through a Magnetic Filter during Cathodic Vacuum...
Macroparticle Reduction and Its Transport Mechanism through a Magnetic Filter during Cathodic Vacuum Arc Deposition with an HEA Target
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Basel: MDPI AG
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Language
English
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Basel: MDPI AG
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Contents
By cathodic arc deposition, the effects of the magnetic field, working pressure, inner-wall structure, and cross-section area of the magnetic-filter duct on the macroparticle (MP) distribution were investigated with a high-entropy alloy target. The MP density increased with the density of the plasma beam transporting through the filter duct, which...
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Full title
Macroparticle Reduction and Its Transport Mechanism through a Magnetic Filter during Cathodic Vacuum Arc Deposition with an HEA Target
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TN_cdi_proquest_journals_2728458696
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2728458696
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ISSN
2079-6412
E-ISSN
2079-6412
DOI
10.3390/coatings12101437
