Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride pho...
Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuit
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Author / Creator
Ye, Zhichao , Jia, Haiyan , Huang, Zhangjun , Chen, Shen , Long, Jinbao , Shi, Baoqi , Yi-Han, Luo , Gao, Lan , Sun, Wei , Guo, Hairun , He, Jijun and Liu, Junqiu
Publisher
Ithaca: Cornell University Library, arXiv.org
Journal title
Language
English
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Publisher
Ithaca: Cornell University Library, arXiv.org
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Scope and Contents
Contents
The foundry development of integrated photonics has revolutionized today's optical interconnect and datacenters. Over the last decade, we have witnessed the rising of silicon nitride (Si\(_3\)N\(_4\)) integrated photonics, which is currently transferring from laboratory research to foundry manufacturing. The development and transition are triggered...
Alternative Titles
Full title
Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuit
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Record Identifier
TN_cdi_proquest_journals_2785476866
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2785476866
Other Identifiers
E-ISSN
2331-8422
DOI
10.48550/arxiv.2303.05004
