Cleaning Effect of Atmospheric-Plasma-Sprayed Y2O3 Coating Using Piranha Solution Based on Contamina...
Cleaning Effect of Atmospheric-Plasma-Sprayed Y2O3 Coating Using Piranha Solution Based on Contamination Particle Measurement
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Publisher
Basel: MDPI AG
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Language
English
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Basel: MDPI AG
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Contents
A Y2O3 coating was prepared using the atmospheric plasma spraying (APS) technique. On exposing the coating to CF4/O2/Ar plasma, a fluorine contamination layer (YOxFy) was formed, which was the main cause of process drift and contamination particle generation on the APS–Y2O3 coating surface. To remove the YOxFy layer on the coating surface, a piranh...
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Full title
Cleaning Effect of Atmospheric-Plasma-Sprayed Y2O3 Coating Using Piranha Solution Based on Contamination Particle Measurement
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TN_cdi_proquest_journals_2791606506
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2791606506
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ISSN
2079-6412
E-ISSN
2079-6412
DOI
10.3390/coatings13030653
