Protection of Cu from Oxidation by Ta Capping Layer
Protection of Cu from Oxidation by Ta Capping Layer
About this item
Full title
Protection of Cu from Oxidation by Ta Capping Layer
Author / Creator
Publisher
Basel: MDPI AG
Journal title
Coatings (Basel), 2023-05, Vol.13 (5), p.926
Language
English
Formats
Publication information
Publisher
Basel: MDPI AG
Subjects
More information
Scope and Contents
Contents
X-ray reflectometry (XRR) and X-ray photoelectron spectroscopy (XPS) measurements (core levels and valence bands) were made of Cu thin films that were prepared and coated by capping Ta layers with different thicknesses (5, 10, 15, 20, and 30 Å), and are presented. The XRR and XPS Ta 4f-spectra revealed a complete oxidation of the protective layer u...
Alternative Titles
Full title
Protection of Cu from Oxidation by Ta Capping Layer
Authors, Artists and Contributors
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_journals_2819439871
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2819439871
Other Identifiers
ISSN
2079-6412
E-ISSN
2079-6412
DOI
10.3390/coatings13050926
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