The effects of simultaneous electrophoresis and thermophoresis on particulate contamination of an in...
The effects of simultaneous electrophoresis and thermophoresis on particulate contamination of an inverted EUVL photomask surface in parallel airflow
About this item
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Author / Creator
Publisher
Berlin/Heidelberg: Springer Berlin Heidelberg
Journal title
Language
English
Formats
Publication information
Publisher
Berlin/Heidelberg: Springer Berlin Heidelberg
Subjects
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Scope and Contents
Contents
The combined influences of electrophoresis and thermophoresis on particle deposition on the inverted critical surface of a flat plate in parallel airflow were investigated by employing the statistical Lagrangian particle tracking approach in an effort to assess the degree of particulate contamination of EUVL photomasks during horizontal transport i...
Alternative Titles
Full title
The effects of simultaneous electrophoresis and thermophoresis on particulate contamination of an inverted EUVL photomask surface in parallel airflow
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Author / Creator
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Record Identifier
TN_cdi_proquest_journals_2920036009
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_2920036009
Other Identifiers
ISSN
2190-5444
E-ISSN
2190-5444
DOI
10.1140/epjp/i2012-12122-y
