Directed block copolymer self-assembly for nanoelectronics fabrication
Directed block copolymer self-assembly for nanoelectronics fabrication
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Author / Creator
Publisher
New York, USA: Cambridge University Press
Journal title
Language
English
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Publisher
New York, USA: Cambridge University Press
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Scope and Contents
Contents
This paper provides an overview of directed self-assembly (DSA) options that exhibit potential for enabling extensible high-volume patterning of nanoelectronics devices. It describes the current set of research requirements, which a DSA technology must satisfy to warrant insertion consideration, and summarizes the state-of-the art. The primary focu...
Alternative Titles
Full title
Directed block copolymer self-assembly for nanoelectronics fabrication
Authors, Artists and Contributors
Author / Creator
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Record Identifier
TN_cdi_proquest_journals_908613662
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_journals_908613662
Other Identifiers
ISSN
0884-2914
E-ISSN
2044-5326
DOI
10.1557/jmr.2010.74
