Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates a...
Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array
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Publisher
Heidelberg: Science China Press
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Language
English
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Publisher
Heidelberg: Science China Press
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This paper presents mathematical formulae showing that the distance mismatch for an uncentered proof mass in an accelerator sensor does not influence the linearity of the closed-loop accelerometer as a whole.This asymmetry in sensors only introduces an output voltage offset in the readout integrated circuit.Numerical simulation using Matlab/Simulin...
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Full title
Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array
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TN_cdi_proquest_miscellaneous_1551070137
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_1551070137
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ISSN
1674-733X
E-ISSN
1869-1919
DOI
10.1007/s11432-013-4863-0
