Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone
Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone
About this item
Full title
Author / Creator
Haga, K , Abe, S , Takizawa, Y , Yubuta, K and Shishido, T
Publisher
Bristol: IOP Publishing
Journal title
Language
English
Formats
Publication information
Publisher
Bristol: IOP Publishing
Subjects
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Scope and Contents
Contents
The fibrous bis (acetylacetonato) zinc (II) (Zn(C5H7O2)2·xH2O) was prepared with novel apparatus involved the vaporization and the recrystallization, and was investigated by differential thermal analysis (DTA), flourier transform infrared spectroscopy (FT-IR) with attenuated total reflection (ATR), and the inductively coupled plasma optical emissio...
Alternative Titles
Full title
Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone
Authors, Artists and Contributors
Author / Creator
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Primary Identifiers
Record Identifier
TN_cdi_proquest_miscellaneous_1718925654
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_1718925654
Other Identifiers
ISSN
1742-6596,1742-6588
E-ISSN
1742-6596
DOI
10.1088/1742-6596/417/1/012059
