Solution-Based High-Density Arrays of Dielectric Microsphere Structures for Improved Crystal Quality...
Solution-Based High-Density Arrays of Dielectric Microsphere Structures for Improved Crystal Quality of III-Nitride Layers on Si Substrates
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Cairo, Egypt: Hindawi Publishing Corporation
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Language
English
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Publisher
Cairo, Egypt: Hindawi Publishing Corporation
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Contents
The recent development of dielectric microsphere lithography has been able to open up new means of performing simple and easy patterning on the semiconductor surfaces. Here, we report uniform and high-density arrays of microspheres using a solution-based spin-coating method. The arrays of microspheres were used for etching mask to form the arrays o...
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Full title
Solution-Based High-Density Arrays of Dielectric Microsphere Structures for Improved Crystal Quality of III-Nitride Layers on Si Substrates
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TN_cdi_proquest_miscellaneous_1778006876
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_1778006876
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ISSN
1687-4110
E-ISSN
1687-4129
DOI
10.1155/2015/639750
