SIMS Analysis of Fe Impurity Concentration in a PVT-Grown 4H-SiC Bulk Crystal and Source Powders
SIMS Analysis of Fe Impurity Concentration in a PVT-Grown 4H-SiC Bulk Crystal and Source Powders
About this item
Full title
Author / Creator
Publisher
Pfaffikon: Trans Tech Publications Ltd
Journal title
Language
English
Formats
Publication information
Publisher
Pfaffikon: Trans Tech Publications Ltd
Subjects
More information
Scope and Contents
Contents
Iron (Fe) impurity concentrations in a SiC bulk crystal and source powders used for the bulk crystal growth are analyzed by means of secondary ion mass spectrometry and the validity of the obtained data are discussed. The secondary ion signal of 56Fe is found to be affected significantly by the mass interference of 28Si2, and therefore measurements...
Alternative Titles
Full title
SIMS Analysis of Fe Impurity Concentration in a PVT-Grown 4H-SiC Bulk Crystal and Source Powders
Authors, Artists and Contributors
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_miscellaneous_1793233752
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_1793233752
