Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films
Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films
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Publisher
Washington, DC: American Association for the Advancement of Science
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Language
English
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Publisher
Washington, DC: American Association for the Advancement of Science
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Contents
The registration and alignment of a monolayer of microdomains in a self-assembled block copolymer thin film can be controlled by chemical or physical templating methods. Although planar patterns are useful for nanoscale device fabrication, three-dimensional multilevel structures are required for some applications. We found that a bilayer film of a...
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Full title
Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films
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TN_cdi_proquest_miscellaneous_1808090558
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_1808090558
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ISSN
0036-8075
E-ISSN
1095-9203
DOI
10.1126/science.1218437
