Ultralow-dielectric-constant amorphous boron nitride
Ultralow-dielectric-constant amorphous boron nitride
About this item
Full title
Author / Creator
Hong, Seokmo , Lee, Chang-Seok , Lee, Min-Hyun , Lee, Yeongdong , Ma, Kyung Yeol , Kim, Gwangwoo , Yoon, Seong In , Ihm, Kyuwook , Kim, Ki-Jeong , Shin, Tae Joo , Kim, Sang Won , Jeon, Eun-chae , Jeon, Hansol , Kim, Ju-Young , Lee, Hyung-Ik , Lee, Zonghoon , Antidormi, Aleandro , Roche, Stephan , Chhowalla, Manish , Shin, Hyeon-Jin and Shin, Hyeon Suk
Publisher
London: Nature Publishing Group UK
Journal title
Language
English
Formats
Publication information
Publisher
London: Nature Publishing Group UK
Subjects
More information
Scope and Contents
Contents
Decrease in processing speed due to increased resistance and capacitance delay is a major obstacle for the down-scaling of electronics
1
–
3
. Minimizing the dimensions of interconnects (metal wires that connect different electronic components on a chip) is crucial for the miniaturization of devices. Interconnects are isolated from each...
Alternative Titles
Full title
Ultralow-dielectric-constant amorphous boron nitride
Authors, Artists and Contributors
Author / Creator
Lee, Chang-Seok
Lee, Min-Hyun
Lee, Yeongdong
Ma, Kyung Yeol
Kim, Gwangwoo
Yoon, Seong In
Ihm, Kyuwook
Kim, Ki-Jeong
Shin, Tae Joo
Kim, Sang Won
Jeon, Eun-chae
Jeon, Hansol
Kim, Ju-Young
Lee, Hyung-Ik
Lee, Zonghoon
Antidormi, Aleandro
Roche, Stephan
Chhowalla, Manish
Shin, Hyeon-Jin
Shin, Hyeon Suk
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_miscellaneous_2417388088
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_2417388088
Other Identifiers
ISSN
0028-0836
E-ISSN
1476-4687
DOI
10.1038/s41586-020-2375-9
