Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processin...
Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing
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Basel: MDPI AG
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Language
English
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Basel: MDPI AG
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Contents
A focused ion beam scanning electron microscope (FIB-SEM) is a powerful tool that is routinely used for scale imaging from the micro- to nanometer scales, micromachining, prototyping, and metrology. In spite of the significant capabilities of a FIB-SEM, there are inherent artefacts (e.g., structural defects, chemical interactions and phase changes,...
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Full title
Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing
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TN_cdi_proquest_miscellaneous_2893846456
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_2893846456
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ISSN
1996-1944
E-ISSN
1996-1944
DOI
10.3390/ma16227220
