Topology optimization of electrostatically actuated microsystems
Topology optimization of electrostatically actuated microsystems
Publication information
Publisher
Heidelberg: Springer Nature B.V
Subjects
More information
Scope and Contents
Contents
This study addresses the design of electrostatically actuated microelectromechanical systems by topology optimization. The layout of the structure and the electrode are simultaneously optimized. A novel, continuous, material-based description of the interface between the structural and electrostatic domains is presented that allows the optimization...
Alternative Titles
Full title
Topology optimization of electrostatically actuated microsystems
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_proquest_miscellaneous_31923782
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_31923782
Other Identifiers
ISSN
1615-147X
E-ISSN
1615-1488
DOI
10.1007/s00158-005-0531-3
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