Two-Color Single-Photon Photoinitiation and Photoinhibition for Subdiffraction Photolithography
Two-Color Single-Photon Photoinitiation and Photoinhibition for Subdiffraction Photolithography
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Publisher
Washington, DC: American Association for the Advancement of Science
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Language
English
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Publisher
Washington, DC: American Association for the Advancement of Science
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Scope and Contents
Contents
Controlling and reducing the developed region initiated by photoexposure is one of the fundamental goals of optical lithography. Here, we demonstrate a two-color irradiation scheme whereby initiating species are generated by single-photon absorption at one wavelength while inhibiting species are generated by single-photon absorption at a second, in...
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Full title
Two-Color Single-Photon Photoinitiation and Photoinhibition for Subdiffraction Photolithography
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Record Identifier
TN_cdi_proquest_miscellaneous_743542580
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_miscellaneous_743542580
Other Identifiers
ISSN
0036-8075
E-ISSN
1095-9203
DOI
10.1126/science.1167610
