Log in to save to my catalogue

Applied Materials, Inc.; Patent Application Titled "Tungsten Growth Modulation by Controlling Surfac...

Applied Materials, Inc.; Patent Application Titled "Tungsten Growth Modulation by Controlling Surfac...

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_wirefeeds_1519999486

Applied Materials, Inc.; Patent Application Titled "Tungsten Growth Modulation by Controlling Surface Composition" Published Online

About this item

Full title

Applied Materials, Inc.; Patent Application Titled "Tungsten Growth Modulation by Controlling Surface Composition" Published Online

Publisher

Atlanta: NewsRx

Journal title

Chemicals & Chemistry, 2014, p.3878

Language

English

Publication information

Publisher

Atlanta: NewsRx

More information

Scope and Contents

Contents

According to news reporting originating from Washington, D.C., by VerticalNews journalists, a patent application by the inventors WU, KAI (Palo Alto, CA); Park, Kiejin (San Jose, CA); Yu, Sang Ho (Cupertino, CA); Lee, Sang-Hyeob (Fremont, CA); Daito, Kazuya (Santa Clara, CA); Collins, Joshua (Sunnyvale, CA); Wang, Benjamin C. (Santa Clara, CA), fil...

Alternative Titles

Full title

Applied Materials, Inc.; Patent Application Titled "Tungsten Growth Modulation by Controlling Surface Composition" Published Online

Identifiers

Primary Identifiers

Record Identifier

TN_cdi_proquest_wirefeeds_1519999486

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_wirefeeds_1519999486

Other Identifiers

ISSN

1944-1517

How to access this item