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Semiconductor Equipment and Materials Companies; Patent Application Titled "Pulsed Gas Plasma Doping...

Semiconductor Equipment and Materials Companies; Patent Application Titled "Pulsed Gas Plasma Doping...

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_wirefeeds_1614985639

Semiconductor Equipment and Materials Companies; Patent Application Titled "Pulsed Gas Plasma Doping Method and Apparatus" Published Online

About this item

Full title

Semiconductor Equipment and Materials Companies; Patent Application Titled "Pulsed Gas Plasma Doping Method and Apparatus" Published Online

Publisher

Atlanta: NewsRx

Journal title

Chemicals & Chemistry, 2014, p.3345

Language

English

Publication information

Publisher

Atlanta: NewsRx

Subjects

Subjects and topics

More information

Scope and Contents

Contents

According to news reporting originating from Washington, D.C., by VerticalNews journalists, a patent application by the inventors VENTZEK, Peter (Austin, TX); NEMOTO, Takenao (Sendai, JP); UEDA, Hirokazu (Sendai, JP); KOBAYASHI, Yuuki (Kurokawa, JP); HORIGOME, Masahiro (Sendai, JP), filed on April 3, 2014, was made available online on October 16, 2...

Alternative Titles

Full title

Semiconductor Equipment and Materials Companies; Patent Application Titled "Pulsed Gas Plasma Doping Method and Apparatus" Published Online

Identifiers

Primary Identifiers

Record Identifier

TN_cdi_proquest_wirefeeds_1614985639

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_wirefeeds_1614985639

Other Identifiers

ISSN

1944-1517

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