WIPO PUBLISHES PATENT OF CARL ZEISS SMT, JENS PROCHNAU, DIRK SCHAFFER, ANDREAS WURMBRAND, BERNHARD G...
WIPO PUBLISHES PATENT OF CARL ZEISS SMT, JENS PROCHNAU, DIRK SCHAFFER, ANDREAS WURMBRAND, BERNHARD GELLRICH AND MARKUS KERN FOR "MIRROR MODULE, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS" (GERMAN INVENTORS)
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WIPO PUBLISHES PATENT OF CARL ZEISS SMT, JENS PROCHNAU, DIRK SCHAFFER, ANDREAS WURMBRAND, BERNHARD GELLRICH AND MARKUS KERN FOR "MIRROR MODULE, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS" (GERMAN INVENTORS)
Publisher
Washington, D.C: HT Digital Streams Limited
Journal title
US Fed News Service, Including US State News, 2016
Language
English
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Publisher
Washington, D.C: HT Digital Streams Limited
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Full title
WIPO PUBLISHES PATENT OF CARL ZEISS SMT, JENS PROCHNAU, DIRK SCHAFFER, ANDREAS WURMBRAND, BERNHARD GELLRICH AND MARKUS KERN FOR "MIRROR MODULE, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS" (GERMAN INVENTORS)
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TN_cdi_proquest_wirefeeds_1768479659
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_wirefeeds_1768479659
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