Lam Research (LRCX) issued patent titled "Amorphous Carbon Layer Opening Process"

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_wirefeeds_2488719078

Full title

Publisher

Melbourne: News Bites Pty Ltd

Journal title

News Bites - Computing & Information, 2021

Language

English

Formats

Publisher

Melbourne: News Bites Pty Ltd

Subjects and topics

Full title

Lam Research (LRCX) issued patent titled "Amorphous Carbon Layer Opening Process"

Record Identifier

TN_cdi_proquest_wirefeeds_2488719078

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_proquest_wirefeeds_2488719078

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