Enhancing ferroelectric stability: wide-range of adaptive control in epitaxial HfO2/ZrO2 superlattic...
Enhancing ferroelectric stability: wide-range of adaptive control in epitaxial HfO2/ZrO2 superlattices
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Author / Creator
Li, Jingxuan , Deng, Shiqing , Ma, Liyang , Si, Yangyang , Zhou, Chao , Wang, Kefan , Huang, Sizhe , Yang, Jiyuan , Tang, Yunlong , Ku, Yu-Chieh , Kuo, Chang-Yang , Li, Yijie , Das, Sujit , Liu, Shi and Chen, Zuhuang
Publisher
London: Nature Publishing Group UK
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Language
English
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Publisher
London: Nature Publishing Group UK
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Contents
The metastability of the polar phase in HfO
2
, despite its excellent compatibility with the complementary metal-oxide-semiconductor process, remains a key obstacle for its industrial applications. Traditional stabilization approaches, such as doping, often induce crystal defects and impose constraints on the thickness of ferroelectric HfO
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Full title
Enhancing ferroelectric stability: wide-range of adaptive control in epitaxial HfO2/ZrO2 superlattices
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TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_12254504
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_12254504
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ISSN
2041-1723
E-ISSN
2041-1723
DOI
10.1038/s41467-025-61758-2