In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside s...
In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
About this item
Full title
Author / Creator
Publisher
London: Nature Publishing Group UK
Journal title
Language
English
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Publication information
Publisher
London: Nature Publishing Group UK
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More information
Scope and Contents
Contents
Silicon is an excellent material for microelectronics and integrated photonics
1
–
3
, with untapped potential for mid-infrared optics
4
. Despite broad recognition of the importance of the third dimension
5
,
6
, current lithography methods do not allow the fabrication of photonic devices and functional microelements...
Alternative Titles
Full title
In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
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Primary Identifiers
Record Identifier
TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_5624509
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_5624509
Other Identifiers
ISSN
1749-4885
E-ISSN
1749-4893
DOI
10.1038/s41566-017-0004-4
