Influence of Carrier Gases on the Quality of Epitaxial Corundum-Structured α-Ga2O3 Films Grown by Mi...
Influence of Carrier Gases on the Quality of Epitaxial Corundum-Structured α-Ga2O3 Films Grown by Mist Chemical Vapor Deposition Method
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Author / Creator
Xu, Yu , Zhang, Chunfu , Cheng, Yaolin , Li, Zhe , Cheng, Ya’nan , Feng, Qian , Chen, Dazheng , Zhang, Jincheng and Hao, Yue
Publisher
Basel: MDPI AG
Journal title
Language
English
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Publication information
Publisher
Basel: MDPI AG
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Scope and Contents
Contents
This report systematically investigates the influence of different carrier gases (O2, N2, and air) on the growth of gallium oxide (Ga2O3) thin films on c-plane sapphire substrates by using the mist-CVD method. Although XRD and Raman measurements show that the pure corundum-structured α-Ga2O3 with single (0006) plane orientation was successfully obt...
Alternative Titles
Full title
Influence of Carrier Gases on the Quality of Epitaxial Corundum-Structured α-Ga2O3 Films Grown by Mist Chemical Vapor Deposition Method
Authors, Artists and Contributors
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Primary Identifiers
Record Identifier
TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_6888560
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_6888560
Other Identifiers
ISSN
1996-1944
E-ISSN
1996-1944
DOI
10.3390/ma12223670
