Size Effects in Internal Friction of Nanocrystalline Aluminum Films
Size Effects in Internal Friction of Nanocrystalline Aluminum Films
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Publisher
Basel: MDPI AG
Journal title
Language
English
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Publication information
Publisher
Basel: MDPI AG
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Scope and Contents
Contents
Al thin film is extensively used in micro-electromechanical systems (MEMS) and electronic interconnections; however, most previous research has concentrated on their quasi-static properties and applied their designs on larger scales. The present study designed a paddle-like cantilever specimen with metal films deposited on the upper surface to inve...
Alternative Titles
Full title
Size Effects in Internal Friction of Nanocrystalline Aluminum Films
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Primary Identifiers
Record Identifier
TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_8233858
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_pubmedcentral_primary_oai_pubmedcentral_nih_gov_8233858
Other Identifiers
ISSN
1996-1944
E-ISSN
1996-1944
DOI
10.3390/ma14123401
