Structural and optical analysis of Cr2N thin films prepared by DC magnetron sputtering
Structural and optical analysis of Cr2N thin films prepared by DC magnetron sputtering
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Publisher
Beijing: University of Science and Technology Beijing
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Language
English
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Beijing: University of Science and Technology Beijing
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Contents
Chromium nitride （Cr2N） thin films were prepared by a DC magnetron sputtering technique. The deposition temperature was raised from 50 to 300℃, and its influence on the film structure and refractive index was investigated. X-ray diffraction analysis shows that the crystalline strucure of the films transforms from the （101） to （002） oriented hexagon...
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Full title
Structural and optical analysis of Cr2N thin films prepared by DC magnetron sputtering
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TN_cdi_wanfang_journals_bjkjdxxb_e201502012
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_wanfang_journals_bjkjdxxb_e201502012
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ISSN
1674-4799
E-ISSN
1869-103X
DOI
10.1007/s12613-015-1061-7
