用于检测激光棒的变倾角马赫-曾德尔干涉仪
用于检测激光棒的变倾角马赫-曾德尔干涉仪
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孔璐 , 陈磊 , 丁煜 , 吴志飞 , 郑东晖 , 朱文华 / Kong Lu , Chen, Lei , Ding, Yu , Wu Zhifei , Zheng Donghui and Zhu, Wenhua
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Chengdu: Editorial Office of Opto-Electronic Advances
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Chengdu: Editorial Office of Opto-Electronic Advances
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为实现激光棒透射波前的测量，改善一般泰曼型或斐索型干涉仪测量小口径激光棒透射波前时的边缘衍射效应，研究了一种变倾角移相马赫-曾德尔干涉仪。通过调整移相反射镜的倾斜姿态，改变入射到马赫-曾德尔干涉光路的光束倾角，参考光束与测试光束的光程差随之变化，从而在相干光之间引入相移，实现了相移干涉测量。利用该干涉仪测量一根口径为Ф6 mm、长度为60 mm激光棒(Nd:YAG)的透射波前，测量结果的峰谷值(PV)为0.391λ，均方根值(RMS)为0.056λ；使用ZYGO激光干涉仪测量同一根激光棒，其透射波前的峰谷值(PV)为0.370λ，均方根值(RMS)为0.064λ。对比结果表明该干涉仪能实现光学元件透射波前的高精度检测，测试结果的一致性验证了该方案的可行性。该变倾角移相方法具有较高的移相精度和...
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用于检测激光棒的变倾角马赫-曾德尔干涉仪
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TN_cdi_wanfang_journals_gdgc202002007
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_wanfang_journals_gdgc202002007
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1003-501X
DOI
10.12086/oee.2020.190254
