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Author / Creator:Sato, Yohei ; Tang, Chao ; Watanabe, Katsuya ; Nakajima, Mayu ; Yamamoto, Takuya ; Tezuka, Nobuki ; Tanabe, Tadao ; Oyama, Yutaka
Publisher:New York: Springer US
Journal title:Journal of electronic materials, 2021-05, Vol.50 (5), p.2649-2655
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