Photoresist Use in Semiconductor Manufacturing [electronic resource] / Organisation for Economic Co-...
Photoresist Use in Semiconductor Manufacturing [electronic resource] / Organisation for Economic Co-...
Photoresist Use in Semiconductor Manufacturing [electronic resource] / Organisation for Economic Co-operation and Development
About this item
Full title
Author / Creator
Publisher
Paris : OECD Publishing, 2014.
Alternative title
Date
2014.
Record Identifier
MMS ID
Language
English
Formats
Physical Description
Physical content
1 online resource (117 pages)
Content type
text
Media type
computer
Carrier type
online resource
Publication information
Publisher
Paris : OECD Publishing, 2014.
Date Published
2014.
Subjects
More information
Scope and Contents
Summary
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry. The document presents standard approaches for estimating environmental releases of and occupational exposures to additives and components used in photoresist form...
Alternative Titles
Full title
Photoresist Use in Semiconductor Manufacturing [electronic resource] / Organisation for Economic Co-operation and Development
Variant title
BOOK
Authors, Artists and Contributors
Author / Creator
Notes
General note
Series on Emission Scenario Documents, 23114606 ; no.9
Bibliographic Level Mode of Issuance: Monograph
Language note
English
Identifiers
Primary Identifiers
Record Identifier
74VK3l4Ezv83
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VK3l4Ezv83
Other Identifiers
ISBN
9789264221161 (PDF)
MMS ID
991023945211402626
