Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, editor, C. Grant Willso...
Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, editor, C. Grant Willso...
Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.
About this item
Full title
Publisher
Washington, DC : American Chemical Society, 1994.
Date
1994.
Call Numbers
N621.381531/7
Record Identifier
MMS ID
Language
English
Formats
Physical Description
Physical content
xii, 571 p. : ill. ; 24 cm.
Publication information
Publisher
Washington, DC : American Chemical Society, 1994.
Place of Publication
District of Columbia
Date Published
1994.
Subjects
More information
Alternative Titles
Full title
Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.
Authors, Artists and Contributors
Notes
General note
ACS symposium series ; 537.
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Includes bibliographical references and indexes....
Identifiers
Primary Identifiers
Call Numbers
N621.381531/7
Record Identifier
74VKvdlPxr5O
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VKvdlPxr5O
Other Identifiers
ISBN
0841227217
9780841227217 (alk. paper)
0841227217 (alk. paper)
9780841227217
DDC
621.381531
MMS ID
991021449959702626
