IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, an...
IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
About this item
Full title
Publisher
New York, N.Y. : Institute of Electrical and Electronics Engineers, c1988-
Alternative title
Call Numbers
NQ621.3815305/2
Record Identifier
MMS ID
Language
English
Formats
Physical Description
Physical content
v. : ill. ; 28 cm.
Frequency
Quarterly.
Contents
Vol. 1, no. 1 (Feb. 1988)-
Publication information
Publisher
New York, N.Y. : Institute of Electrical and Electronics Engineers, c1988-
Frequency
Quarterly.
Place of Publication
New York (State)
Date Published
c1988-
Subjects
More information
Alternative Titles
Full title
IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
Portion of title
Semiconductor manufacturing.
Transactions on semiconductor manufacturing.
Abbreviated title
IEEE trans. semicond. manuf.
Authors, Artists and Contributors
Notes
General note
Title from cover.
Additional physical form availability note
Available in microfiche and microfilm.
Issued As
IEEE transactions on semiconductor manufacturing (Online)
Contextual Information
Date Copyright
c1988-
Identifiers
Primary Identifiers
Call Numbers
NQ621.3815305/2
Record Identifier
74Vv6v6mEBPX
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74Vv6v6mEBPX
Other Identifiers
ISSN
0894-6507
DDC
620
621.3815305
MMS ID
991006794029702626
