Polymers in microlithography : materials and processes / Elsa Reichmanis, editor, Scott A. MacDonald...
Polymers in microlithography : materials and processes / Elsa Reichmanis, editor, Scott A. MacDonald...
Polymers in microlithography : materials and processes / Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.
About this item
Full title
Publisher
Washington, DC : American Chemical Society, 1989.
Date
1989.
Call Numbers
N621.381531/4B , N621.381531/4A , N621.381531/4
Record Identifier
MMS ID
Language
English
Formats
Physical Description
Physical content
xii, 449 p. : ill. ; 24 cm.
Publication information
Publisher
Washington, DC : American Chemical Society, 1989.
Place of Publication
District of Columbia
Date Published
1989.
Subjects
More information
Alternative Titles
Full title
Polymers in microlithography : materials and processes / Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.
Authors, Artists and Contributors
Notes
General note
ACS symposium series ; 412.
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
Includes bibliographical references.
Identifiers
Primary Identifiers
Call Numbers
N621.381531/4B , N621.381531/4A , N621.381531/4
Record Identifier
74VvQ8Za32mZ
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VvQ8Za32mZ
Other Identifiers
ISBN
0841217017 (alk. paper)
9780841217010 (alk. paper)
DDC
621.381531
MMS ID
991014607969702626
