Handbook of contamination control in microelectronics : principles, applications, and technology / e...
Handbook of contamination control in microelectronics : principles, applications, and technology / e...
Handbook of contamination control in microelectronics : principles, applications, and technology / edited by Donald L. Tolliver.
About this item
Full title
Publisher
Park Ridge, N.J., U.S.A. : Noyes Publications, c1988.
Call Numbers
T0362114
Record Identifier
MMS ID
Language
English
Formats
Physical Description
Physical content
xxi, 488 p. : ill. ; 25 cm.
Publication information
Publisher
Park Ridge, N.J., U.S.A. : Noyes Publications, c1988.
Place of Publication
New Jersey
Date Published
c1988.
Subjects
More information
Scope and Contents
Summary
Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean roo...
Alternative Titles
Full title
Handbook of contamination control in microelectronics : principles, applications, and technology / edited by Donald L. Tolliver.
Authors, Artists and Contributors
Author / Artists
Notes
General note
Materials science and process technology series.
Includes bibliographies and index.
State Reference Library copy: transferred from 621.38173/68.
Additional physical form availability note
Also available online via the World Wide Web, by subscription to Knovel.
Identifiers
Primary Identifiers
Call Numbers
T0362114
Record Identifier
74VvoBj5wWDO
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VvoBj5wWDO
Other Identifiers
ISBN
0815511515
9780815511519 :
0815511515 :
9781591240815 (electronic bk.)
1591240816 (electronic bk.)
9780815511519
DDC
621.3815
621.38173
668.374
MMS ID
991013387179702626
