Chemical vapor deposition for microelectronics : principles, technology, and applications / by Arthu...
Chemical vapor deposition for microelectronics : principles, technology, and applications / by Arthu...
Chemical vapor deposition for microelectronics : principles, technology, and applications / by Arthur Sherman.
About this item
Full title
Chemical vapor deposition for microelectronics : principles, technology, and applications / by Arthur Sherman.
Author / Creator
Publisher
Park Ridge, N.J., U.S.A. : Noyes Publications, c1987.
Call Numbers
N621.3817/27
Record Identifier
74Vvq66mpJoX
MMS ID
991006140959702626
Language
English
Formats
Physical Description
Physical content
xi, 215 p. : ill. ; 25 cm.
Publication information
Publisher
Park Ridge, N.J., U.S.A. : Noyes Publications, c1987.
Place of Publication
New Jersey
Date Published
c1987.
Subjects
More information
Alternative Titles
Full title
Chemical vapor deposition for microelectronics : principles, technology, and applications / by Arthur Sherman.
Authors, Artists and Contributors
Author / Creator
Notes
General note
Materials science and process technology series.
Includes bibliographies and index.
Identifiers
Primary Identifiers
Call Numbers
N621.3817/27
Record Identifier
74Vvq66mpJoX
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74Vvq66mpJoX
Other Identifiers
ISBN
0815511361 :
9780815511366 :
DDC
621.381
621.3817
MMS ID
991006140959702626
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