Microelectronics processing : inorganic materials characterization / Lawrence A. Casper, editor ; de...
Microelectronics processing : inorganic materials characterization / Lawrence A. Casper, editor ; de...
Microelectronics processing : inorganic materials characterization / Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.
About this item
Full title
Publisher
Washington, DC : American Chemical Society, 1986.
Date
1986.
Call Numbers
N621.3817/24
Record Identifier
MMS ID
Language
English
Formats
Physical Description
Physical content
x, 443 p. : ill. ; 24 cm.
Publication information
Publisher
Washington, DC : American Chemical Society, 1986.
Place of Publication
District of Columbia
Date Published
1986.
Subjects
More information
Alternative Titles
Full title
Microelectronics processing : inorganic materials characterization / Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.
Authors, Artists and Contributors
Notes
General note
ACS symposium series ; 295.
Includes bibliographies and indexes.
Identifiers
Primary Identifiers
Call Numbers
N621.3817/24
Record Identifier
74VvqBdzrpmZ
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VvqBdzrpmZ
Other Identifiers
ISBN
0841209340
9780841209343
DDC
621.3817
MMS ID
991006358189702626
